Determining the Effect of Annealing on the Crystal Structure of CoSi2Si/Si (100) Formed by MBE

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Determining the Effect of Annealing on the Crystal Structure of CoSi2/Si (100) Formed by MBE, SSE and RE Epitaxy Techniques

View Book :- https://stm.bookpi.org/NAER-V5/article/view/2084

#Impurities #profiles #influences #thermal_annealing #depth #concentration_distribution #radiation_dose #activation_temperatures #ion_implantation #structure #silicide #film



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